The paper presents simulation and analysis of a capacitively-based Micro Electro Mechanical Systems (MEMS) cantilever sensor for tuberculosis detection. This sensor consists of a vibrating cantilever, which is driven by an electric field. To detect the presence of tuberculosis in the patient blood sample, this sensor is placed on the surface of the cantilever which is immobilized with the antibody specific to Tb antigen 85 complex. The patient blood sample contains the Tb antigen 85 complex if affected with the disease. This Tb antigen in the sample binds to the antibody on the cantilever causing the cantilever to bend. As the sample is introduced, the changes induced by antigen-antibody binding cause a detectable bending of the cantilever which can be measured capacitively. The response time of the sensor to Tb antigen is very less as compared to the other procedures which can be further improved with optimized device designs to detect the disease. Antigens up to pictogram level can be measured. The simulations of the sensor structure were performed using coventorware software. This sensor can be designed as a microdiagnostic kit to detect diseases.

In application areas of very high significance to mankind, smart technology term is extensively used in all branches of science and engineering due to its immense potential. This technology has been used to address challenges in various areas such as automotive, civil, mechanical and biomedical and communication engineering. This science is inclined towards miniaturization with the popularization of Micro Electro Mechanical Systems (MEMS). MEMS are tiny micromachined systems (measured in microns) that are typically arranged on small chips (less than cm by cm) for different purpose. They are primarily silicon-based and manufactured using various etching and deposition techniques. MEMS applications are in inkjet printer heads, airbag deployment sensors and biomedical sensors (biosensor).

Recent years has seen increased incidence of tuberculosis in both developing and industrialized counties. Unlike the other procedures currently employed for diagnosing tuberculosis, the microcantilever-based TB diagnostic device has unique features like less number of steps involved, low cost, ultrasensitivity and easy-to-use label-free microgravimetric procedure. It could be used in small diagnostic labs in remote areas and would make possible point-of-care testing. In this research, we investigate the performance of cantilever sensor for detection of tuberculosis.

Electrical and Electronics Engineering Journal, MEMS, Biosensor Cantilever, Micro Electro Mechanical Systems (MEMS).